Embedded high resolution sensor based on optical feedback in Vertical Cavity Surface Emitting Laser
نویسندگان
چکیده
This paper describes the fabrication of a novel type of pressure sensor based on optical feedback in a Vertical Cavity Surface Emitting Laser (VCSEL). The detection mechanism of the sensor is based on a displacement measurement through self-mixing interferometry in the laser cavity. The use of unpackaged VCSELs enables the embedding in thin flexible optical foils which results in an integrated pressure sensor. A proof of principle set-up has been developed and a first integrated sensor is tested. Keywords—Integration, Optical feedback, Optical sensing, Self-mixing interferometry, VCSEL
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